The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2024
Filed:
Sep. 21, 2021
Toshiaki Masuda, Kanagawa, JP;
Toshiaki Masuda, Kanagawa, JP;
RICOH COMPANY, LTD., Tokyo, JP;
Abstract
An actuator includes a substrate, a diaphragm over the substrate, a lower electrode over the diaphragm, a lead titanate (PbTiO) layer over the lower electrode, a piezoelectric body over the PbTiOlayer, and an upper electrode over the piezoelectric body. The piezoelectric body comprises particles of lead zirconate titanate (PZT). An average diameter of the particles of the PZT is 40 nm or more. The average diameter is measured by capturing an electron backscatter diffraction image of the piezoelectric body in an image area of 20 μm×20 μm, fitting each of the particles in the image area, and determining an average value of diameters of the circles.