The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2024
Filed:
Feb. 07, 2023
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Evan Colgan, Montvale, NJ (US);
Joshua T. Smith, Croton on Hudson, NY (US);
Benjamin Wunsch, Mt. Kisco, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B01L 3/00 (2006.01); B81B 7/00 (2006.01); G01N 15/02 (2006.01);
U.S. Cl.
CPC ...
B01L 3/502707 (2013.01); B01L 3/502715 (2013.01); B01L 3/502761 (2013.01); B81B 7/0061 (2013.01); B81C 1/00111 (2013.01); B81C 1/00309 (2013.01); G01N 15/0255 (2013.01); B01L 3/502723 (2013.01); B01L 3/502753 (2013.01); B01L 2200/0652 (2013.01); B01L 2200/0689 (2013.01); B01L 2300/12 (2013.01); B81B 2201/058 (2013.01); B81B 2203/0361 (2013.01); G01N 2015/0288 (2013.01);
Abstract
A method for fabricating a fluidic device includes depositing a sacrificial material on a pillar array arranged on a substrate. The method also includes removing a portion of the sacrificial material. The method further includes depositing a sealing layer on the pillar array to form a sealed fluidic cavity.