The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2024
Filed:
Aug. 12, 2022
Applicant:
Ichor Systems, Inc., Fremont, CA (US);
Inventors:
Chris Melcer, Santa Cruz, CA (US);
Phillip Ryan Barros, Pleasanton, CA (US);
Haruyuki Kubota, San Francisco, CA (US);
Randolph Treur, San Luis Obispo, CA (US);
Todd Mark Cushman, Santa Clara, CA (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 27/00 (2006.01); F16J 15/10 (2006.01); F16L 43/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); F16J 15/104 (2013.01); F16J 15/106 (2013.01); F16K 27/003 (2013.01); F16L 43/00 (2013.01); Y10T 137/5109 (2015.04); Y10T 137/5283 (2015.04);
Abstract
A substrate block for a fluid delivery system is provided, the substrate block having an upper surface. The upper surface has an inlet substrate port and an outlet substrate port formed into the upper surface. A substrate fluid passageway extends from the inlet substrate port and the outlet substrate port. The substrate fluid passageway extends in a smooth arc which is free of corners or angular walls.