The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2024
Filed:
Feb. 02, 2022
Ihp Gmbh—innovations for High Performance Microelectronics / Leibniz-institut Fur Innovative Mikroelektronik, Frankfurt, DE;
Abstract
The present invention relates to producing an electro-optical phase shifter such that it may be integrated into a front-end of line of an electronic-photonic integrated circuit. A conducting bottom layer with a first refractive index is provided. A center layer including a ferroelectric material and with a second refractive index is provided on top of a first region of the conducting bottom layer, such that the center layer is not on top of a second region of the conducting bottom layer. A conducting top layer with a third refractive index is provided on top of the center layer. The second refractive index is lower than the first refractive index and lower than the third refractive index, such that the conducting bottom layer, the center layer, and the conducting top layer form a slot waveguide. A first electrical connector which connects the second region of the conducting bottom layer with an upper layer is provided. Additionally, a second electrical connector which connects the conducting top layer with the upper layer is provided. A first electrode and a second electrode are provided in the upper layer such that the first electrode connects to the second region of the conducting bottom layer via the first electrical connector and the second electrode connects to the conducting top layer via the second electrical connector.