Thz measuring device and thz measuring method for determining a layer thickness or a distance of a measurement object

Abstract

The invention relates to a THz measuring device for measuring a layer thickness of a wall () of a measurement object () and/or of a distance () between boundary surfaces () of a measurement object (), comprising a transmitter and receiver unit () including a Terahertz-Sender and a Terahertz receiver, a controller means configured to determine the layer thickness of the wall () of the measurement object () and/or a distance () between boundary surfaces () of the measurement object () from a time-of-flight difference of the Terahertz radiation reflected on a first boundary surface () of the wall () of the measurement object () and the Terahertz radiation reflected on a second boundary surface () of the wall (), where in the beam path () of the at least one transmitter and receiver unit () an adjustable optical unit () including a reflector is arranged, where a surface of the reflector is designed to deflect the irradiated Terahertz radiation and/or the Terahertz radiation reflected from the respective boundary surface () for adjusting the optical axis (C) of the transmitter and receiver unit (). Hereby, according to the invention, it is provided that the reflector is designed to be deformable so that a beam cross-section of the irradiated Terahertz radiation can be modified in a focusing plane () lying downstream from the reflector in the radiation direction of the irradiated Terahertz radiation, the focusing plane being adjustable by deforming the reflector.