The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2024
Filed:
Apr. 29, 2022
Applicant:
Samsung Sdi Co., Ltd., Yongin-si, KR;
Inventors:
Jaeyeol Baek, Suwon-si, KR;
Shinhyo Bae, Suwon-si, KR;
Yoojeong Choi, Suwon-si, KR;
Soonhyung Kwon, Suwon-si, KR;
Hyeon Park, Suwon-si, KR;
Assignee:
SAMSUNG SDI CO., LTD., Yongin-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/11 (2006.01); G03F 7/004 (2006.01); G03F 7/039 (2006.01); G03F 7/06 (2006.01); G03F 7/09 (2006.01); G03F 7/095 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0955 (2013.01); G03F 7/0045 (2013.01); G03F 7/0392 (2013.01); G03F 7/066 (2013.01); G03F 7/094 (2013.01);
Abstract
A resist underlayer composition and a method of forming patterns, the composition including a polymer including at least one of a first moiety represented by Chemical Formula 1-1 and a second moiety represented by Chemical Formula 1-2; a thermal acid generator including a salt composed of an anion of an acid and a cation of a base, the base having pKa of greater than or equal to about 7; and a solvent,