The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2024
Filed:
May. 08, 2023
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Eunkyung Lee, Seoul, KR;
Sumin Kim, Suwon-si, KR;
Hyunwoo Kim, Seongnam-si, KR;
Juhyeon Park, Hwaseong-si, KR;
Giyoung Song, Asan-si, KR;
Sukkoo Hong, Suwon-si, KR;
Yoonhyun Kwak, Seoul, KR;
Youngmin Nam, Seoul, KR;
Byunghee Sohn, Yongin-si, KR;
Sunyoung Lee, Seoul, KR;
Aram Jeon, Seoul, KR;
Sungwon Choi, Hwaseong-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 309/12 (2006.01); C07C 381/12 (2006.01); C07D 333/76 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 309/12 (2013.01); C07C 381/12 (2013.01); C07D 333/76 (2013.01); G03F 7/038 (2013.01); G03F 7/039 (2013.01); C07C 2603/74 (2017.05);
Abstract
Disclosed are a photoacid generator, a photoresist composition including the same, and a method of preparing the photoacid generator. The photoacid generator may include a compound represented by Formula 1: