The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 14, 2024

Filed:

Oct. 14, 2020
Applicant:

Ayar Labs, Inc., Santa Clara, CA (US);

Inventors:

Sidney Buchbinder, Berkeley, CA (US);

John Fini, Albany, CA (US);

Anatol Khilo, Dublin, CA (US);

Assignee:

Ayar Labs, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/01 (2006.01); G02B 6/136 (2006.01); H01S 5/026 (2006.01); H01S 5/06 (2006.01);
U.S. Cl.
CPC ...
G02F 1/0147 (2013.01); G02B 6/136 (2013.01); G02F 1/011 (2013.01); H01S 5/026 (2013.01); H01S 5/0612 (2013.01); G02F 2201/06 (2013.01); G02F 2203/50 (2013.01);
Abstract

A thermo-optic phase shifter includes a substrate having a cavity formed into an upper region of the substrate. The thermo-optic phase shifter includes an optical waveguide disposed above the substrate. The optical waveguide extends across and above the cavity. The thermo-optic phase shifter also includes a heater device disposed along a lateral side of the optical waveguide. The heater device extends across and above the cavity. The cavity is formed by an undercut etching process after the optical waveguide and the heater device is formed. The optical waveguide can be formed to include one or more segments that pass over the cavity. Also, a second heater device can be included such that the one or more segments of the optical waveguide that extend over the cavity are bracketed by heater devices. Thermal transmission structures can be included to enhance heat transfer between the heater device(s) and the optical waveguide.


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