The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 14, 2024

Filed:

Jun. 29, 2018
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Ryo Kobayashi, Kawasaki, JP;

Hirofumi Shiono, Fujisawa, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 1/38 (2006.01); B01F 33/301 (2022.01); G01N 35/08 (2006.01);
U.S. Cl.
CPC ...
G01N 1/38 (2013.01); B01F 33/3017 (2022.01); G01N 35/085 (2013.01); G01N 2001/383 (2013.01);
Abstract

The present invention provides a fluidic device in which solutions of different concentrations can be easily obtained. The fluidic device includes: a first substrate and a second substrate which are stacked in a thickness direction; an undiluted solution introduction flow path which has an undiluted solution introduction port and which is constituted of a groove part provided on at least one of the first substrate and the second substrate; a first circulation flow path which is constituted of a groove part having an annular shape and having a shared part that shares part of a flow path with the undiluted solution introduction flow path and a non-shared part which is not shared with the undiluted solution introduction flow path and which is connected to a diluting solution introduction port; a second circulation flow path which is provided independently of the first circulation flow path and which is constituted of a groove part having an annular shape and having a shared part that shares some flow path with the undiluted solution introduction flow path and a non-shared part which is not shared with the undiluted solution introduction flow path and which is connected to a diluting solution introduction port; and/or a third circulation flow path which is constituted of a groove part having an annular shape and having a shared flow path that shares part of a flow path with the first circulation flow path and a non-shared flow path which is not shared with the first circulation flow path and which is connected to a diluting solution introduction port, wherein the undiluted solution introduction flow path includes a valve at both ends of the shared part.


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