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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11981558 B1

PDFFull Text
Date of Patent:
May. 14, 2024

Filed:

Apr. 26, 2021

Piezoelectric actuator provided with a deformable structure having improved mechanical properties and fabrication method thereof

Applicant:

Stmicroelectronics S.r.l., Agrate Brianza, IT;

Inventors:

Domenico Giusti, Caponago, IT;

Marco Ferrera, Concorezzo, IT;

Carlo Luigi Prelini, Seveso, IT;

Assignee:

STMICROELECTRONICS S.r.l., Agrate Brianza, IT;

Attorney:

Seed IP Law Group LLP

Primary Examiner:

Elias Ullah

Int. Cl.
CPC ...
H04R 7/04 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); F16K 31/00 (2006.01); H04R 1/02 (2006.01); H04R 3/00 (2006.01); H04R 7/18 (2006.01); H04R 19/02 (2006.01);
U.S. Cl.
CPC ...
B81B 3/007 (2013.01); B81C 1/00658 (2013.01); F16K 31/005 (2013.01); H04R 1/02 (2013.01); H04R 3/00 (2013.01); H04R 7/04 (2013.01); H04R 7/18 (2013.01); H04R 19/02 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/054 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/0338 (2013.01); B81B 2203/04 (2013.01); B81B 2207/03 (2013.01); H04R 2201/003 (2013.01);
Abstract

The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.

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