The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2024
Filed:
Sep. 16, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Ashavani Kumar, Sunnyvale, CA (US);
Ashwin Chockalingam, Santa Clara, CA (US);
Sivapackia Ganapathiappan, Los Altos, CA (US);
Rajeev Bajaj, San Jose, CA (US);
Boyi Fu, San Jose, CA (US);
Daniel Redfield, Morgan Hill, CA (US);
Nag B. Patibandla, Pleasanton, CA (US);
Mario Dagio Cornejo, San Jose, CA (US);
Amritanshu Sinha, Sunnyvale, CA (US);
Yan Zhao, Santa Clara, CA (US);
Ranga Rao Arnepalli, Andhra Pradesh, IN;
Fred C. Redeker, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments described herein relate to integrated abrasive (IA) polishing pads, and methods of manufacturing IA polishing pads using, at least in part, surface functionalized abrasive particles in an additive manufacturing process, such as a 3D inkjet printing process. In one embodiment, a method of forming a polishing article includes dispensing a first plurality of droplets of a first precursor, curing the first plurality of droplets to form a first layer comprising a portion of a sub-polishing element, dispensing a second plurality of droplets of the first precursor and a second precursor onto the first layer, and curing the second plurality of droplets to form a second layer comprising portions of the sub-polishing element and portions of a plurality of polishing elements. Here, the second precursor includes functionalized abrasive particles having a polymerizable group chemically bonded to surfaces thereof.