The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 14, 2024

Filed:

May. 01, 2019
Applicant:

Electro Scientific Industries, Inc., Portland, OR (US);

Inventor:

Yunlong Sun, Beaverton, OR (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/06 (2014.01); B23K 26/0622 (2014.01); B23K 26/40 (2014.01); B23K 103/00 (2006.01); B23K 103/10 (2006.01); B23K 103/12 (2006.01); B23K 103/16 (2006.01);
U.S. Cl.
CPC ...
B23K 26/0624 (2015.10); B23K 26/0622 (2015.10); B23K 26/40 (2013.01); B23K 2103/10 (2018.08); B23K 2103/12 (2018.08); B23K 2103/172 (2018.08); B23K 2103/30 (2018.08); B23K 2103/42 (2018.08); B23K 2103/50 (2018.08); B23K 2103/52 (2018.08);
Abstract

A series of laser pulse bundles or bursts are used for micromachining target structures. Each burst includes short laser pulses with temporal pulse widths that are less than approximately 1 nanosecond. A laser micromachining method includes generating a burst of laser pulses and adjusting an envelope of the burst of laser pulses for processing target locations. The method includes adjusting the burst envelope by selectively adjusting one or more first laser pulses within the burst to a first amplitude based on processing characteristics of a first feature at a target location, and selectively adjusting one or more second laser pulses within the burst to a second amplitude based on processing characteristics of a second feature at the target location. The method further includes directing the amplitude adjusted burst of laser pulses to the target location.


Find Patent Forward Citations

Loading…