The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2024
Filed:
Mar. 27, 2019
Applicant:
Soitec, Bernin, FR;
Inventors:
Djamel Belhachemi, Saint Martin d'heres, FR;
Thierry Barge, Chevrieres, FR;
Assignee:
Soitec, Bernin, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 3/02 (2006.01); H10N 30/00 (2023.01); H10N 30/05 (2023.01); H10N 30/073 (2023.01); H10N 30/853 (2023.01);
U.S. Cl.
CPC ...
H03H 3/02 (2013.01); H10N 30/05 (2023.02); H10N 30/073 (2023.02); H10N 30/10516 (2023.02); H10N 30/8542 (2023.02); Y10T 29/42 (2015.01);
Abstract
A method for manufacturing a substrate for a radiofrequency filter by joining a piezoelectric layer to a carrier substrate via an electrically insulating layer, wherein the method comprises depositing the electrically insulating layer by spin coating an oxide belonging to the family of SOGs (spin-on glasses) on the surface of the piezoelectric layer to be joined to the carrier substrate, followed by an anneal for densifying the electrically insulating layer before joining the piezoelectric layer to the carrier substrate via the electrically insulating layer.