The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 07, 2024

Filed:

May. 25, 2021
Applicant:

Samsung Display Co., Ltd., Yongin, KR;

Inventors:

Sang-Joon Seo, Yongin-Si, KR;

Hoon-Kee Min, Yongin-Si, KR;

Dong-Un Jin, Yongin-Si, KR;

Sung-Guk An, Yongin-Si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/786 (2006.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01); G02F 1/1333 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/786 (2013.01); C23C 16/345 (2013.01); C23C 16/401 (2013.01); H01L 29/6675 (2013.01); G02F 1/133305 (2013.01); G02F 2201/501 (2013.01); Y10T 428/26 (2015.01);
Abstract

A substrate for a flexible display is disclosed. The substrate has a film stress range that does not affect an electronic device such as a thin film transistor, and includes a barrier layer having excellent oxygen and moisture blocking characteristics, and a method of manufacturing the substrate. The substrate includes; a plastic substrate having a glass transition temperature from about 350° C. to about 500° C.; and a barrier layer disposed on the plastic substrate, having a inti layer structure, wherein at least one silicon oxide layer and at least one silicon nitride layer are alternately stacked on each other, and having a film stress from about −200 MPa to about 200 MPa due to the at least one silicon oxide layer and the at least one silicon nitride layer.


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