The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 07, 2024

Filed:

Jul. 05, 2022
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventors:

Matti Liukku, Helsinki, FI;

Ville-Pekka Rytkönen, Klaukkala, FI;

Anssi Blomqvist, Helsinki, FI;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
G01P 15/0802 (2013.01); G01P 15/125 (2013.01); G01P 2015/0831 (2013.01); G01P 2015/0857 (2013.01); G01P 2015/086 (2013.01);
Abstract

A microelectromechanical accelerometer for measuring acceleration, comprising a first proof mass and ae second proof mass. The first proof mass is adjacent to the second proof mass. A suspension structure allows the first proof mass to undergo rotation out of the device plane about a first rotation axis and the suspension structure allows the second proof mass to undergo rotation out of the device plane about a second rotation axis. The first and second rotation axes are parallel to each other and define an x-direction which is parallel to the first and the second rotation axes and a y-direction which is perpendicular to the x-direction. The y-coordinate of the first rotation axis is greater than the y-coordinate of the second rotation axis by a nonzero distance D.


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