The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2024
Filed:
Jul. 11, 2023
Applicant:
Canon Anelva Corporation, Kawasaki, JP;
Inventor:
Takeo Tsukamoto, Niigata, JP;
Assignee:
CANON ANELVA CORPORATION, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/2206 (2018.01); G01N 23/04 (2018.01); G01N 23/083 (2018.01); G01N 23/18 (2018.01); G01N 23/20008 (2018.01); G01N 23/223 (2006.01); G21K 7/00 (2006.01); H01J 35/18 (2006.01);
U.S. Cl.
CPC ...
G01N 23/18 (2013.01); G01N 23/04 (2013.01); G01N 23/083 (2013.01); G01N 23/20008 (2013.01); G01N 23/2206 (2013.01); G01N 23/223 (2013.01); G21K 7/00 (2013.01); H01J 35/186 (2019.05); G01N 2223/04 (2013.01); G01N 2223/052 (2013.01); G01N 2223/071 (2013.01); G01N 2223/076 (2013.01); G01N 2223/1016 (2013.01); G01N 2223/20 (2013.01); G01N 2223/204 (2013.01); G01N 2223/32 (2013.01); G01N 2223/643 (2013.01); G01N 2223/652 (2013.01);
Abstract
An inspection apparatus for inspecting an inspection target object, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection target object, and a plurality of X-ray detectors, wherein each of the plurality of X-ray detectors detects X-rays emitted from a foreign substance existing on an inspection target surface of the inspection target object irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.