The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2024
Filed:
Sep. 03, 2020
Applicant:
Fujikin Incorporated, Osaka, JP;
Inventors:
Takatoshi Nakatani, Osaka, JP;
Atsushi Hidaka, Osaka, JP;
Ichiro Tokuda, Osaka, JP;
Keisuke Nakatsuji, Osaka, JP;
Assignee:
FUJIKIN INCORPORATED, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); C23C 16/52 (2006.01);
U.S. Cl.
CPC ...
C23C 16/448 (2013.01); C23C 16/52 (2013.01);
Abstract
A vaporization supply apparatusincludes a preheating sectionfor preheating a liquid raw material L, a vaporization sectionprovided on top of the preheating sectionfor heating and vaporizing the preheated liquid raw material L sent from the preheating section, a flow rate control deviceprovided on top of the vaporization sectionfor controlling the flow rate of a gas G sent from the vaporization section, and heatersfor heating the preheating section, the vaporization sectionand the flow rate control device