The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 30, 2024

Filed:

Aug. 26, 2021
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventors:

Hiroyuki Yamashita, Yokkaichi Mie, JP;

Yuta Saito, Yokkaichi Mie, JP;

Keiichi Sawa, Yokkaichi Mie, JP;

Kazuhiro Matsuo, Kuwana Mie, JP;

Yuta Kamiya, Nagoya Aichi, JP;

Shinji Mori, Nagoya Aichi, JP;

Kota Takahashi, Yokkaichi Mie, JP;

Junichi Kaneyama, Yokkaichi Mie, JP;

Tomoki Ishimaru, Yokkaichi Mie, JP;

Kenichiro Toratani, Yokkaichi Mie, JP;

Ha Hoang, Kuwana Mie, JP;

Shouji Honda, Kuwana Mie, JP;

Takafumi Ochiai, Mie, JP;

Assignee:

Kioxia Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10B 43/27 (2023.01); H01L 21/28 (2006.01); H01L 29/423 (2006.01); H10B 41/27 (2023.01);
U.S. Cl.
CPC ...
H10B 43/27 (2023.02); H01L 29/40114 (2019.08); H01L 29/40117 (2019.08); H01L 29/42324 (2013.01); H01L 29/4234 (2013.01); H10B 41/27 (2023.02);
Abstract

According to one embodiment, a semiconductor storage device includes a plurality of electrode films on a substrate, spaced from one another in a first direction. A charge storage film is provided on a side face the electrode films via a first insulating film. A semiconductor film is provided on a side face of the charge storage film via a second insulating film. The charge storage film includes a plurality of insulator regions contacting the first insulating film, a plurality of semiconductor or conductor regions provided between the insulator regions and another insulator region.


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