The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2024
Filed:
Mar. 22, 2022
Applicant:
University of South Carolina, Columbia, SC (US);
Inventors:
Venkata Surya N. Chava, Columbia, SC (US);
MVS Chandrashekhar, Columbia, SC (US);
Anusha Balachandran, Columbia, SC (US);
Assignee:
University of South Carolina, Columbia, SC (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/11 (2006.01); H01L 31/109 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1105 (2013.01); H01L 31/109 (2013.01); H01L 31/1816 (2013.01);
Abstract
A voltage tunable solar-blind UV detector using a EG/SiC heterojunction based Schottky emitter bipolar phototransistor with EG grown on p-SiC epi-layer using a chemically accelerated selective etching process of Si using TFS precursor.