The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2024
Filed:
Nov. 10, 2020
Applicant:
Suzhou Oriental Semiconductor Co., Ltd., Jiangsu, CN;
Inventors:
Assignee:
SUZHOU ORIENTAL SEMICONDUCTOR CO., LTD., Jiangsu, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 21/308 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0634 (2013.01); H01L 21/3086 (2013.01); H01L 29/7813 (2013.01);
Abstract
A manufacturing method of a semiconductor super-junction device includes the following steps: An n-type substrate is etched in a self-aligning manner using a first insulating layer and a second insulating layer as a mask to form a second groove in the n-type substrate. A gate structure is formed in the second groove.