The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2024
Filed:
Sep. 30, 2019
Applicant:
Nikon Corporation, Tokyo, JP;
Inventor:
Yuichi Shibazaki, Kumagaya, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/08 (2014.01); B33Y 30/00 (2015.01); B33Y 50/02 (2015.01); B23K 26/342 (2014.01); B23K 26/70 (2014.01); B23K 26/14 (2014.01); B23K 26/16 (2006.01); B33Y 10/00 (2015.01); B23K 26/146 (2014.01); B22F 10/25 (2021.01); B22F 12/20 (2021.01); B22F 12/70 (2021.01); B22F 12/44 (2021.01); B22F 10/32 (2021.01);
U.S. Cl.
CPC ...
B23K 26/08 (2013.01); B22F 10/25 (2021.01); B22F 12/20 (2021.01); B22F 12/70 (2021.01); B23K 26/146 (2015.10); B23K 26/1464 (2013.01); B23K 26/16 (2013.01); B23K 26/342 (2015.10); B23K 26/703 (2015.10); B33Y 10/00 (2014.12); B33Y 30/00 (2014.12); B33Y 50/02 (2014.12); B22F 10/32 (2021.01); B22F 12/44 (2021.01);
Abstract
The processing system is provided with: a liquid supply device which can supply a liquid; a liquid processing device which processes a liquid supplied from the liquid supply device such that a non-liquid-immersion state is generated locally in a partial area including a target portion on a predetermined surface; a beam irradiation section which emits beams toward the target portion; and a moving apparatus which moves the predetermined surface. The beams are irradiated on the target portion to apply a predetermined processing to the target portion, in a state in which the target portion is in the non-liquid-immersion state.