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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11969822 B1

PDFFull Text
Date of Patent:
Apr. 30, 2024

Filed:

Sep. 30, 2019

Processing method and processing system

Applicant:

Nikon Corporation, Tokyo, JP;

Inventor:

Yuichi Shibazaki, Kumagaya, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Elizabeth M Kerr

Int. Cl.
CPC ...
B23K 26/08 (2014.01); B33Y 30/00 (2015.01); B33Y 50/02 (2015.01); B23K 26/342 (2014.01); B23K 26/70 (2014.01); B23K 26/14 (2014.01); B23K 26/16 (2006.01); B33Y 10/00 (2015.01); B23K 26/146 (2014.01); B22F 10/25 (2021.01); B22F 12/20 (2021.01); B22F 12/70 (2021.01); B22F 12/44 (2021.01); B22F 10/32 (2021.01);
U.S. Cl.
CPC ...
B23K 26/08 (2013.01); B22F 10/25 (2021.01); B22F 12/20 (2021.01); B22F 12/70 (2021.01); B23K 26/146 (2015.10); B23K 26/1464 (2013.01); B23K 26/16 (2013.01); B23K 26/342 (2015.10); B23K 26/703 (2015.10); B33Y 10/00 (2014.12); B33Y 30/00 (2014.12); B33Y 50/02 (2014.12); B22F 10/32 (2021.01); B22F 12/44 (2021.01);
Abstract

The processing system is provided with: a liquid supply device which can supply a liquid; a liquid processing device which processes a liquid supplied from the liquid supply device such that a non-liquid-immersion state is generated locally in a partial area including a target portion on a predetermined surface; a beam irradiation section which emits beams toward the target portion; and a moving apparatus which moves the predetermined surface. The beams are irradiated on the target portion to apply a predetermined processing to the target portion, in a state in which the target portion is in the non-liquid-immersion state.

Find Patent Forward Citations

Shibazaki, Yuichi. (2024). Processing method and processing system (U.S. Patent No. 11969822). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11969822

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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