The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2024
Filed:
Nov. 26, 2019
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
Masato Uehara, Tosu, JP;
Hiroshi Yamada, Tosu, JP;
Morito Akiyama, Tosu, JP;
Sri Ayu Anggraini, Tosu, JP;
Kenji Hirata, Tosu, JP;
Abstract
There are provided a piezoelectric body of ytterbium-doped aluminum nitride, having a greater piezoelectric coefficient dor gthan those not doped with ytterbium, and a MEMS device using the piezoelectric body. The piezoelectric body is represented by a chemical formula AlYbN where a value of x is more than 0 and less than 0.37 and having a lattice constant ratio c/a in a range of 1.53 or more and less than 1.6. The piezoelectric body with such a configuration has a greater piezoelectric coefficient dor gthan those not doped with ytterbium.