The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 23, 2024

Filed:

Jun. 04, 2022
Applicant:

Emcore Corporation, Alhambra, CA (US);

Inventors:

Sergey Alexandrovich Zotov, Concord, CA (US);

Arvind K. Srivastava, Brentwood, CA (US);

Assignee:

EMCORE CORPORATION, Alhambra, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/18 (2013.01); G01P 15/08 (2006.01); G01P 15/09 (2006.01); G01P 15/097 (2006.01); G01P 21/00 (2006.01);
U.S. Cl.
CPC ...
G01P 15/18 (2013.01); G01P 15/0802 (2013.01); G01P 15/09 (2013.01); G01P 15/097 (2013.01); G01P 21/00 (2013.01); G01P 2015/0814 (2013.01); G01P 2015/0817 (2013.01);
Abstract

An inventive accelerometer includes a proof mass and a pair of vibrating sensors. An excitation-and-detection circuit drives one sensor at resonant frequencies fand F, with f≠F; a second excitation-and-detection circuit drives the other sensor at resonant frequencies fand F, with f≠F. The vibrational modes driven at the frequencies fand fare the same for each sensor; the vibrational modes driven at the frequencies Fand Fare the same for each sensor. Compressive or tensile loads oppositely applied by the proof mass to the vibrating sensors cause a difference frequency ΔF=F−Fto vary monotonically with acceleration of the apparatus along a sensing axis, from which a measurement of acceleration can be generated.


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