The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2024
Filed:
Nov. 09, 2020
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Yong Min Yoo, Seoul, KR;
Jong Won Shon, Seoul, KR;
Seung Woo Choi, Cheonan-si, KR;
Dong Seok Kang, Cheonan-si, KR;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/509 (2006.01); C25D 11/02 (2006.01); C25D 11/04 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C25D 11/04 (2013.01); C23C 16/4404 (2013.01); C23C 16/4409 (2013.01); C23C 16/4412 (2013.01); C23C 16/45525 (2013.01); C23C 16/4583 (2013.01); C23C 16/5096 (2013.01); C25D 11/022 (2013.01); H01J 37/3244 (2013.01); H01J 37/32715 (2013.01); H01L 21/6719 (2013.01); H01L 21/68735 (2013.01); H01L 21/68757 (2013.01); H01J 37/32477 (2013.01);
Abstract
A substrate supporting plate that may prevent deposition on a rear surface of a substrate and may easily unload the substrate. The substrate supporting plate may include a substrate mounting portion and a peripheral portion surrounding the substrate mounting portion. An edge portion of a top surface of the substrate mounting portion may be anodized. A central portion of the top surface of the substrate mounting portion may not be anodized.