The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2024
Filed:
Feb. 06, 2023
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Christian Bretthauer, Munich, DE;
David Tumpold, Kirchheim beim München, DE;
Pradyumna Mishra, San Jose, CA (US);
Daniel Neumaier, Feldkirchen, AT;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 17/02 (2006.01); B81B 7/04 (2006.01); G01H 11/08 (2006.01); G01P 1/02 (2006.01); G01P 15/08 (2006.01); G01P 15/09 (2006.01); G01P 15/18 (2013.01); H04R 1/04 (2006.01); H04R 1/28 (2006.01); H10N 30/30 (2023.01); H10N 30/87 (2023.01); H04R 7/18 (2006.01); H04R 17/10 (2006.01);
U.S. Cl.
CPC ...
H04R 17/02 (2013.01); B81B 7/04 (2013.01); G01H 11/08 (2013.01); G01P 15/0802 (2013.01); G01P 15/09 (2013.01); G01P 15/18 (2013.01); H04R 1/28 (2013.01); H10N 30/302 (2023.02); H10N 30/308 (2023.02); H10N 30/87 (2023.02); B81B 2201/0235 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); G01P 1/023 (2013.01); G01P 2015/084 (2013.01); H04R 1/04 (2013.01); H04R 7/18 (2013.01); H04R 17/10 (2013.01); H04R 2201/003 (2013.01);
Abstract
A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.