The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2024
Filed:
Jan. 27, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Sejune Cheon, Seoul, KR;
Jeong Jin Hong, Yongin, KR;
Mikyung Shim, Seongnam, KR;
Xiaoqun Zou, Danville, CA (US);
Jinkyeong Lee, Seoul, KR;
Sang Hong Kim, Seoul, KR;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method includes receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber. The method further includes processing the trace sensor data by a processing device to generate summary data associated with the trace sensor data. The method further includes generating a quality index score based on the summary data. The method further includes providing an alert to a user based on the quality index score. The alert includes an indication that the manufacturing chamber performance does not meet a first threshold.