The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2024
Filed:
Apr. 05, 2021
Samsung Electronics Co., Ltd., Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
An integrated circuit device includes a peripheral circuit structure arranged on a substrate, a gate stack arranged on the peripheral circuit structure and including a plurality of gate electrodes, and a dam structure formed in a dam opening portion that passes through the gate stack. The dam structure includes an insulation spacer on an inner wall of the dam opening portion and a pair of sloped sidewalls at an upper side of the dam opening portion, and a buried layer filling an inside of the dam opening portion and including an air space. The integrated circuit device further includes a mold gate stack surrounded by the dam structure and including a plurality of mold layers, a plurality of conductive lines arranged on the gate stack, and a plurality of through electrodes connected to the plurality of conductive lines, passing through the mold gate stack, and surrounded by the dam structure.