The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2024
Filed:
Apr. 18, 2022
Applicant:
Commissariat À L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 23/66 (2006.01); H01L 27/12 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76275 (2013.01); H01L 21/76283 (2013.01); H01L 27/1203 (2013.01); H01L 23/66 (2013.01); H01L 24/83 (2013.01); H01L 2224/83896 (2013.01);
Abstract
A composite structure, intended for a planar co-integration of electronic components of different functions, the composite structure including from its base towards its surface: a support substrate made of a first material, the support substrate including cavities each opening into an upper face of the support substrate, the cavities being filled with at least one composite material consisting of a matrix of a crosslinked preceramic polymer, the matrix being charged with inorganic particles; and a thin film made of a second material, the thin film being bonded to the upper face of the support substrate and to the composite material.