The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2024
Filed:
Apr. 01, 2021
Screen Holdings Co., Ltd., Kyoto, JP;
Noritake Sumi, Kyoto, JP;
SCREEN HOLDINGS CO., LTD., , JP;
Abstract
An upper flow passageis connected to a buffer space. The upper flow passagehas a constant cross-sectional shape and a processing fluid flows as a laminar flow in the upper flow passage. On the other hand, the buffer spacehas a larger flow passage cross-sectional area than the upper flow passage. Thus, the processing fluid flowing in the upper flow passageis released at once into the wide buffer space, whereby the pressure of the processing fluid decreases. A backflow of the processing fluid from the buffer spaceto the upper flow passageis prevented due to this pressure difference and the magnitude of a flow passage resistance of the upper flow passageviewed from the buffer space