The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 09, 2024

Filed:

Apr. 19, 2022
Applicant:

Mico Ceramics Ltd., Anseong-si, KR;

Inventors:

Ju Sung Lee, Anseong-si, KR;

Haneum Bae, Anseong-si, KR;

Assignee:

MICO CERAMICS LTD., Anseong-si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); C23C 16/458 (2006.01); C23C 16/52 (2006.01); H01J 37/32 (2006.01); H01T 23/00 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); C23C 16/4586 (2013.01); C23C 16/52 (2013.01); H01J 37/32082 (2013.01); H01L 21/6833 (2013.01); H01J 2237/3321 (2013.01);
Abstract

The present disclosure relates to a ceramic susceptor. The ceramic susceptor of the present disclosure includes: an insulating plate on which a high-frequency electrode is disposed; a shaft connected to the insulating plate; a connection mount connected to a longitudinal end of the shaft; a first rod and a second rod, which are connected to the high-frequency electrode, pass through the longitudinal end of the shaft, and extend to the connection mount; and a connection member disposed in the connection mount, wherein the connection member connects the first rod to the second rod.


Find Patent Forward Citations

Lee, Ju. (2024). Ceramic susceptor (U.S. Patent No. 11955320). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11955320

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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