The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2024
Filed:
Apr. 08, 2020
Applicants:
Nikon Corporation, Tokyo, JP;
Kanagawa University, Yokohama, JP;
Inventors:
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/075 (2006.01); C07F 7/18 (2006.01); C23C 18/20 (2006.01); C23C 18/44 (2006.01); H10K 10/46 (2023.01); H10K 71/00 (2023.01); G03F 7/20 (2006.01); H10K 10/84 (2023.01);
U.S. Cl.
CPC ...
G03F 7/0755 (2013.01); C07F 7/1804 (2013.01); C23C 18/204 (2013.01); C23C 18/44 (2013.01); H10K 10/466 (2023.02); H10K 71/621 (2023.02); G03F 7/20 (2013.01); H10K 10/481 (2023.02); H10K 10/84 (2023.02);
Abstract
A compound represented by Formula (1). [In the formula, X represents a halogen atom or an alkoxy group, Rrepresents any one group selected from an alkyl group having 1 to 5 carbon atoms, a group represented by Formula (R2-1), and a group represented by Formula (R2-2), Rrepresents a group represented by Formula (R2-1) or (R2-2), n0 represents an integer of 0 or greater, n1 represents an integer of 0 to 5, and n2 represents a natural number of 1 to 5.]