The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 02, 2024

Filed:

Jan. 31, 2023
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Akshay Gunaji, Karnataka, IN;

Uday Pai, San Jose, CA (US);

Timothy J. Roggenbuck, Beaverton, OR (US);

Sanjeev Baluja, Campbell, CA (US);

Kalesh Panchaxari Karadi, Karnataka, IN;

Tejas Ulavi, San Jose, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05K 5/02 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); H02G 3/04 (2006.01);
U.S. Cl.
CPC ...
H05K 5/0247 (2013.01); C23C 16/45544 (2013.01); C23C 16/4588 (2013.01); H02G 3/0437 (2013.01); C23C 16/4586 (2013.01);
Abstract

Process assemblies and cable management assemblies for managing cables in tight envelopes. A processing assembly includes a top chamber having at least one substrate support, a support shaft, a robot spindle assembly, a stator and a cable management system. The cable management system includes an inner trough assembly and an outer trough assembly configured to move relative to one another, and a plurality of chain links configured to house at least one cable for delivering power to the process assembly.


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