The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 02, 2024

Filed:

Nov. 04, 2019
Applicant:

King Abdullah University of Science and Technology, Thuwal, SA;

Inventors:

Boon S. Ooi, Thuwal, SA;

Aditya Prabaswara, Thuwal, SA;

Jung-Wook Min, Thuwal, SA;

Tien Khee Ng, Thuwal, SA;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 27/15 (2006.01); H01L 33/06 (2010.01); H01L 33/08 (2010.01); H01L 33/18 (2010.01); H01L 33/24 (2010.01); H01L 33/32 (2010.01); H01L 33/42 (2010.01);
U.S. Cl.
CPC ...
H01L 33/007 (2013.01); H01L 27/156 (2013.01); H01L 33/06 (2013.01); H01L 33/08 (2013.01); H01L 33/18 (2013.01); H01L 33/24 (2013.01); H01L 33/42 (2013.01); H01L 33/32 (2013.01); H01L 2933/0016 (2013.01);
Abstract

A method of forming an optoelectronic semiconductor device involves providing an amorphous substrate. A transparent and conductive oxide layer is deposited on the amorphous substrate. The transparent and conductive oxide layer is annealed to form an annealed transparent and conductive oxide layer having a cubic-oriented and/or rhombohedral-oriented surface. A nanorod array is formed on the cubic-oriented and/or rhombohedral-oriented surface of the annealed transparent and conductive oxide layer. The annealing of the transparent conductive oxide layer and the formation of the nanorod array are performed using molecular beam epitaxy (MBE). The nanorods of the nanorod array comprise a group-III material and are non-polar.


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