The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 02, 2024

Filed:

May. 19, 2021
Applicant:

National Technology & Engineering Solutions of Sandia, Llc, Albuquerque, NM (US);

Inventors:

Matt Eichenfield, Albuquerque, NM (US);

Lisa Anne Plucinski Hackett, Albuquerque, NM (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H01L 29/205 (2006.01); H01L 41/18 (2006.01); H01P 1/383 (2006.01); H03F 3/187 (2006.01); H10N 30/853 (2023.01); H10N 39/00 (2023.01); H03H 9/145 (2006.01);
U.S. Cl.
CPC ...
H01L 29/205 (2013.01); H01P 1/383 (2013.01); H03F 3/187 (2013.01); H03H 9/02574 (2013.01); H10N 30/8542 (2023.02); H10N 39/00 (2023.02); H03F 2200/03 (2013.01); H03H 9/02976 (2013.01); H03H 9/14514 (2013.01);
Abstract

An acoustoelectric amplifier and a number of corresponding devices are disclosed, along with methods for making the same. The acoustoelectric amplifier employs wafer-scale bonding to heterogeneously integrate an epitaxial III-V semiconductor stack and a piezoelectric layer. To increase the acoustic gain with low power dissipation, the electromechanical coupling coefficient (k) of the piezoelectric layer should be high to increase the acoustoelectric interaction strength. The semiconductor mobility should be high to reduce the voltage required to increase the carrier drift velocity. The conductivity-thickness product should be low to prevent screening of the acoustoelectric interaction. The acoustoelectric amplifier or its corresponding material structure may be used to form circulators, isolators, oscillators, mixers, and correlators, while interconnecting waveguides may be formed of the piezoelectric layer or the semiconductor stack. An exemplary piezoelectric layer is formed of LiNbO, while an exemplary semiconductor stack is formed of InGaAs/InP.


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