The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 02, 2024

Filed:

Apr. 06, 2021
Applicant:

Servomex Group Limited, Crowborough, GB;

Inventors:

Bahram Alizadeh, Crowborough, GB;

Martin Lopez, Crowborough, GB;

Assignee:

Servomex Group Limited, Crowborough, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); G01J 3/443 (2006.01); G01N 21/67 (2006.01); G01N 21/68 (2006.01); H05H 1/00 (2006.01); H05H 1/24 (2006.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32045 (2013.01); G01J 3/443 (2013.01); G01N 21/67 (2013.01); G01N 21/68 (2013.01); H01J 37/32018 (2013.01); H01J 37/32449 (2013.01); H01J 37/32926 (2013.01); H01J 37/32935 (2013.01); H01J 37/32981 (2013.01); H05H 1/0037 (2013.01); H05H 1/4697 (2021.05); H01J 37/32568 (2013.01); H01J 37/32972 (2013.01); H01J 37/3299 (2013.01); H01J 2237/334 (2013.01);
Abstract

Methods and apparatus for determination of the gas composition of a sample gas using glow discharge optical emission spectroscopy, in which the method comprises: generating one or more oscillating electromagnetic fields within a plasma cell to excite particles within the cell, to produce a glow discharge plasma in the plasma cell, and controlling the operating conditions for the plasma cell while flowing a gas mixture through the plasma cell to maintain glow discharge optical emissions from the plasma within a desired operating range; and monitoring one or more glow discharge optical emissions from the plasma in the plasma cell by measuring the optical emissions, or measuring a signal that correlates with the optical emissions, at twice the plasma excitation frequency; and processing the signal during each excitation cycle of the electromagnetic excitation, to determine the concentration of a gas within a gas mixture flowing through the plasma cell.


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