The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2024
Filed:
Jan. 13, 2021
Korea Institute of Science and Technology, Seoul, KR;
Deok Ha Woo, Seoul, KR;
Yusin Pak, Seoul, KR;
Korea Institute of Science and Technology, Seoul, KR;
Abstract
The present disclosure relates to a hydrogen sensor and a method for manufacturing the same, and more particularly, to a hydrogen sensor having a vertical nanogap structure, in which a nanogap is formed below a sensor portion to bring the sensor portion and an electrode into contact with each other when the sensor portion reacts with hydrogen, so as to allow the sensor portion to expand and contract freely without resistance on a substrate, thereby improving hydrogen sensing accuracy, and it is possible to form a precise nanogap with uniformity and reproducibility at a low cost and a method for manufacturing the same.