The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 02, 2024

Filed:

May. 07, 2020
Applicant:

Silmach, Besancon, FR;

Inventors:

Marc Sworowski, Caen, FR;

Charles Haye, Devecey, FR;

Assignee:

SILMACH, Besancon, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/00 (2006.01); B81B 3/00 (2006.01); G01B 7/16 (2006.01);
U.S. Cl.
CPC ...
G01B 7/18 (2013.01); B81B 3/0086 (2013.01); B81B 2201/02 (2013.01); B81B 2203/04 (2013.01);
Abstract

The present invention relates to a MEMS deformation sensor for measuring a relative movement between two regions of a structure, the sensor comprising: —a first portion () and a second portion () that are movable with respect to one another along a direction of measurement (X); —a thrust element () mounted fixed with respect to the first portion; —a first electrode (A) and a second electrode (B) that are capable of being raised to different electrical potentials, each mounted fixed with respect to the second portion; —a connecting portion (I) forming an electrical link between the first electrode and the second electrode, the thrust element applying a load to the connecting portion when the first portion moves with respect to the second portion along the direction of measurement beyond a predetermined distance, the electrical link being broken under the effect of the load.


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