The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 02, 2024

Filed:

Dec. 07, 2021
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Jaeheung Lee, Hwaseong-si, KR;

Junseong Park, Seoul, KR;

Kanghun Lee, Hwaseong-si, KR;

Seongwan Kim, Hwaseong-si, KR;

Hyouncheol Kim, Hwaseong-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/52 (2006.01); H01L 21/67 (2006.01); C23C 16/44 (2006.01); F16K 1/36 (2006.01); F16K 31/126 (2006.01); F16K 51/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45525 (2013.01); C23C 16/52 (2013.01); H01L 21/67017 (2013.01); H01L 21/67253 (2013.01); C23C 16/4412 (2013.01); C23C 16/45546 (2013.01); F16K 1/36 (2013.01); F16K 31/126 (2013.01); F16K 51/02 (2013.01);
Abstract

A vacuum valve includes a valve flange having a first port, a second port, and a valve seat in a space between the first port and the second port, a valve body in the valve flange, the valve body having a contact surface facing the valve seat, and the valve body being moveable to have the contact surface contact the valve seat and to be separated from the valve seat, a disk on the contact surface of the valve body, the disk having an inclined surface inclined toward the second port, and an actuator connected to the valve flange, the actuator being configured to apply a driving force to the valve body to move the contact surface of the valve body into or out of contact with the valve seat.


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