The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2024
Filed:
May. 21, 2020
Applicant:
Imec Vzw, Leuven, BE;
Inventors:
Assignee:
Imec vzw, Leuven, BE;
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B01L 3/00 (2006.01); B29C 65/02 (2006.01);
U.S. Cl.
CPC ...
B01L 3/502715 (2013.01); B01L 3/502707 (2013.01); B29C 65/02 (2013.01); B81C 1/00119 (2013.01); B01L 2200/10 (2013.01); B01L 2300/0838 (2013.01); B01L 2300/0887 (2013.01); B81C 2201/013 (2013.01); B81C 2203/03 (2013.01); B81C 2203/031 (2013.01); B81C 2203/036 (2013.01);
Abstract
A microfluidic device, a diagnostic device including the microfluidic device and a method for making the microfluidic device are provided. The microfluidic device includes: (i) a transparent substrate comprising a cavity, the cavity opening up to a top of the transparent substrate; (ii) a transparent layer covering the cavity, and (iii) a semiconductor substrate over the transparent layer and the transparent substrate, wherein the semiconductor substrate comprises a through hole overlaying the cavity and exposing the transparent layer.