The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 26, 2024

Filed:

Apr. 07, 2022
Applicant:

Fortemedia, Inc., Santa Clara, CA (US);

Inventors:

Chih-Yuan Chen, Tainan, TW;

Jien-Ming Chen, Tainan, TW;

Feng-Chia Hsu, Tainan, TW;

Wen-Shan Lin, Tainan, TW;

Nai-Hao Kuo, Tainan, TW;

Assignee:

FORTEMEDIA, INC., Alviso, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 19/04 (2006.01); B81B 3/00 (2006.01); H04R 7/04 (2006.01); H04R 7/16 (2006.01);
U.S. Cl.
CPC ...
H04R 19/04 (2013.01); B81B 3/001 (2013.01); B81B 3/0051 (2013.01); B81B 3/0072 (2013.01); H04R 7/04 (2013.01); H04R 7/16 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/019 (2013.01); H04R 2201/003 (2013.01);
Abstract

A micro-electro-mechanical system (MEMS) microphone is provided. The MEMS microphone includes a substrate, a diaphragm, a backplate and a first protrusion. The substrate has an opening portion. The diaphragm is disposed on one side of the substrate and extends across the opening portion of the substrate. The backplate includes a plurality of acoustic holes. The backplate is disposed on one side of the diaphragm. An air gap is formed between the backplate and the diaphragm. The first protrusion extends from the backplate towards the air gap.


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