The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2024
Filed:
Mar. 07, 2019
Rf360 Europe Gmbh, Munich, DE;
Ulrike Roesler, Munich, DE;
Willi Aigner, Moosinning, DE;
Maximilian Schiek, Puchheim, DE;
Giuseppe Toscano, Munich, DE;
RF360 Singapore Pte. Ltd., Republic Plaza, SG;
Abstract
A bulk acoustic wave resonator device comprises bottom and top electrodes (). A piezoelectric layer () sandwiched therebetween has a thickness in the active resonator area different from the thickness in the surrounding area. A method of manufacturing the device comprises a bonding of a piezoelectric wafer to a carrier wafer and splitting a portion of the piezoelectric wafer by an ion-cut technique. Different thicknesses of the piezoelectric layer in the active area and the surrounding area are achieved by implanting ions at different depths.