The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 26, 2024

Filed:

Oct. 13, 2021
Applicant:

Ngk Insulators, Ltd., Nagoya, JP;

Inventors:

Morimichi Watanabe, Nagoya, JP;

Hiroshi Fukui, Obu, JP;

Assignee:

NGK INSULATORS, LTD., Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/24 (2006.01); C30B 25/18 (2006.01); C30B 29/16 (2006.01); H01L 21/02 (2006.01); H01L 29/04 (2006.01);
U.S. Cl.
CPC ...
H01L 29/24 (2013.01); C30B 25/18 (2013.01); C30B 29/16 (2013.01); H01L 21/0242 (2013.01); H01L 21/02488 (2013.01); H01L 21/02565 (2013.01); H01L 21/0262 (2013.01); H01L 29/045 (2013.01);
Abstract

Provided is a semiconductor film having a corundum-type crystal structure composed of α-GaOor an α-GaOsolid solution and the crystal defect density on at least one surface of the semiconductor film is 1.0×10/cmor less.


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Watanabe, Morimichi. (2024). Semiconductor film (U.S. Patent No. 11942520). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11942520

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