The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2024
Filed:
Oct. 12, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Taku Omori, Akishima, JP;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B 23/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G05B 23/0283 (2013.01); G05B 23/0235 (2013.01); G05B 23/0272 (2013.01); H01L 21/67017 (2013.01); H01L 21/67253 (2013.01); H01L 21/67011 (2013.01);
Abstract
Examples of a predictive maintenance method includes determining whether analog data measured in a substrate treatment that has used a recipe exceeds an allowable threshold which corresponds to the recipe and has been determined beforehand, and notifying, in a case where it is determined that the analog data exceeds the allowable threshold in the determination, a user that a relating module which has been associated with the analog data beforehand has deteriorated.
Omori, Taku. (2024). Method for predicting maintenance for components used in substrate treatments, and predictive maintenance device (U.S. Patent No. 11940785). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11940785
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile