The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2024
Filed:
Dec. 19, 2019
Robert Bosch Gmbh, Stuttgart, DE;
Thomas Friedrich, Moessingen-Oeschingen, DE;
Christoph Hermes, Kirchentellinsfurt, DE;
Hans Artmann, Boeblingen-Dagersheim, DE;
Heribert Weber, Nuertingen, DE;
Peter Schmollngruber, Aidlingen, DE;
Volkmar Senz, Metzingen, DE;
ROBERT BOSCH GMBH, Stuttgart, DE;
Abstract
A micromechanical component for a capacitive pressure sensor device includes a substrate; a frame structure that frames a partial surface; a membrane that is tensioned by the frame structure such that a self-supporting region of the membrane extends over the framed partial surface and an internal volume with a reference pressure therein is sealed in an airtight fashion, the self-supporting region of the membrane being deformable by a physical pressure on an external side of the self-supporting region that not equal to the reference pressure; a measurement electrode situated on the framed partial surface; and a reference measurement electrode that is situated on the framed partial surface and is electrically insulated from the measurement electrode.