The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2024
Filed:
Oct. 10, 2017
Applicant:
Jsw Aktina System Co., Ltd., Yokohama, JP;
Inventor:
Suk-Hwan Chung, Kanagawa, JP;
Assignee:
JSW AKTINA SYSTEM CO., LTD., Kanagawa, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/10 (2006.01); B23K 26/08 (2014.01); B23K 26/082 (2014.01); H01L 21/20 (2006.01); H01L 21/268 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
B23K 26/103 (2013.01); B23K 26/082 (2015.10); B23K 26/083 (2013.01); H01L 21/20 (2013.01); H01L 21/268 (2013.01); H01L 21/683 (2013.01);
Abstract
An annealed workpiece manufacturing method of irradiating a workpiece with laser light and annealing the workpiece includes a support step of supporting the workpiece, and an irradiation step of irradiating the supported workpiece with the laser light. In the support step, at least in a laser light irradiation area for the workpiece, the workpiece is supported by a cam member whose upper end height position is adjusted according to a rotation position.