The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 19, 2024

Filed:

Jan. 12, 2021
Applicant:

SK Hynix Inc., Icheon-si, KR;

Inventors:

Ki Chang Jeong, Icheon-si, KR;

Nam Kuk Kim, Icheon-si, KR;

Assignee:

SK hynix Inc., Icheon-si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10B 41/27 (2023.01); H01L 23/522 (2006.01); H10B 41/10 (2023.01); H10B 43/10 (2023.01); H10B 43/27 (2023.01);
U.S. Cl.
CPC ...
H10B 41/27 (2023.02); H01L 23/5226 (2013.01); H10B 41/10 (2023.02); H10B 43/10 (2023.02); H10B 43/27 (2023.02);
Abstract

Provided is a semiconductor memory device and method of fabricating the semiconductor memory device. A semiconductor memory device includes a gate stack and a plurality of channel structures. The gate stack includes a plurality of stacked conductive patterns spaced apart from each other. The plurality of the channel structures is formed through the gate stack. Each of the channel structures includes a first channel pillar, a second channel pillar and a gate insulation layer. The first channel pillar is formed through the conductive patterns except for an uppermost conductive pattern. The second channel pillar is formed through the uppermost conductive pattern. The second channel pillar is configured to make contact with the first channel pillar. The gate insulation layer is interposed between the uppermost conductive pattern and the first and second channel pillars.


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