The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2024
Filed:
Dec. 06, 2022
Canon Kabushiki Kaisha, Tokyo, JP;
Tomokazu Taki, Tochigi, JP;
Toshiki Iwai, Saitama, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides a detection apparatus for detecting a position of a detection target including a diffraction grating pattern, comprising: an illuminator configured to illuminate the detection target with illumination light including a plurality of wavelengths; a wavelength selector including an incident surface on which diffracted light from the detection target is incident, and configured to select light of a specific wavelength from the diffracted light; and a detector configured to receive the light of the specific wavelength selected by the wavelength selector and detect the position of the detection target, wherein positions on the incident surface where light components of the plurality of wavelengths included in the illumination light are incident are different from each other, and wherein the wavelength selector controls each of the plurality of elements in accordance with the position on the incident surface.