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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11933808 B1

PDFFull Text
Date of Patent:
Mar. 19, 2024

Filed:

Dec. 29, 2021

Buffer unit and method for storaging substrate type sensor for measuring of horizontality of a substrate support member provided on a temperature varying atmosphere

Applicant:

Semes Co., Ltd., Cheonan-si, KR;

Inventors:

Young Seop Choi, Cheonan-si, KR;

Yong-Jun Seo, Hwaseong-si, KR;

Sang Hyun Son, Busan, KR;

Ji Young Lee, Cheonan-si, KR;

Gyeong Ryul Kim, Seoul, KR;

Sun Yong Park, Cheonan-si, KR;

Assignee:

SEMES CO., LTD., Cheonan-si, KR;

Attorney:
Primary Examiner:

Walter L Lindsay, Jr

Assistant Examiner:

Andrew V Do

Int. Cl.
CPC ...
G01P 1/02 (2006.01); G01C 9/00 (2006.01); G01P 15/18 (2013.01); H02J 7/02 (2016.01); H02J 50/10 (2016.01);
U.S. Cl.
CPC ...
G01P 1/023 (2013.01); G01C 9/00 (2013.01); G01P 15/18 (2013.01); H02J 7/02 (2013.01); H02J 50/10 (2016.02);
Abstract

A buffer unit for temporarily storing a substrate includes a housing having a space for storing a substrate therein, one or more slots disposed within the housing for placing a substrate thereon, and a holding unit disposed at a bottom portion of the housing, having a flat and non-inclined top surface, and comprising a built-in wireless charging module. A substrate type sensor is stored at the holding unit.

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Quick Actions:

Choi, Young. (2024). Buffer unit and method for storaging substrate type sensor for measuring of horizontality of a substrate support member provided on a temperature varying atmosphere (U.S. Patent No. 11933808). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11933808

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