Optical detection device, optical detection method, method for designing optical detection device, sample classification method, and defect detection method

Abstract

An optical detection device is an optical detection device that detects a desired wavelength component included in input light, and includes: a spectrometer including, for instance, a diffraction grating that receives the input light as an input and outputs an alignment of spectra each of which is a duplication of a spectrum of the input light; a second slit array including an array of three or more slits that pass light beams of wavelengths at three or more locations in the alignment of the spectra that are output from the spectrometer; and an imaging element composed of an array of pixels that receive the light beams, having passed through the second slit array, each of the light beams having three or more wavelength components. At least two pitches between slits are different in the array of the three or more slits included in the second slit array.