The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2024
Filed:
Mar. 23, 2020
Yokogawa Electric Corporation, Tokyo, JP;
Syuhei Okada, Musashino, JP;
Hiroaki Tanaka, Musashino, JP;
Yokogawa Electric Corporation, Tokyo, JP;
Abstract
A measurement apparatus includes a generator that causes electromagnetic waves to be incident on a sample, a receiver that receives electromagnetic waves reflected by the sample, and a controller that controls the generator and receiver. The sample includes a first layer on which the electromagnetic waves are incident and a second layer stacked on the first layer. The controller detects whether a third layer is present between the first and second layers based on the electromagnetic waves incident on the sample from the generator and the electromagnetic waves received by the receiver. The generator causes the electromagnetic waves to be incident at an angle such that the electromagnetic waves are totally reflected between the first and third layers and/or between the first and second layers.